Submicron Integrated Circuits

Comprehensive treatment of integrated circuits in the submicron range. First chapters cover basic devices used in circuits such as silicon MOSFET's, bipolar transistors, GaA MESFET's and HEMT's. There is also a chapter on the relatively new GaA's resonant tunneling diode and transistor. Middle chapters address architecture and circuit wiring. Last chapters discuss rapid thermal processing and lithography.